This book provides the reader with a discussion of X-ray microanalysis and imaging techniques. It is meant to be an introduction for newcomers to the fields and a reference for experienced microscopists. This third edition has been largely rewritten, reflecting the huge advances in hardware and software technology. Table of contents: I. Introduction II. Electron-specimen interaction and X-ray generation III. X-ray measurement IV. Qualitative analysis V. Quantitative analysis VI. Precision and accuracy VII. Operating conditions in the microscope VIII. Digital imaging: Processing and image math IX. Image and feature analysis X. X-ray maps and line scans XI. Application examples