Inhaltsangabe1 Introduction.- Directions in Nanofabrication.- 2 Nanolithography.- Fundamentals of Electron Beam Exposure and Development.- Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning.- Helium Ion Lithography.- Nanoimprint Technologies.- 3 Deposition at the Nanoscale.- Atomic Layer Deposition for Nanotechnology.- Surface Functionalization in the Nanoscale Domain.- Nanostructures Based on Self-Assembly of Block Copolymers.- Epitaxial Growth of Metals on Semiconductors Via Electrodeposition.- 4 Nanoscale Etching and Patterning.- Chemical Mechanical Polish for Nanotechnology.- Deposition, Milling, and Etching with a Focused Helium Ion Beam.- Laser Nanopatterning.- Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania.-