InhaltsangabePart I. NEMS/MEMS Devices.- 1. Thin Film Bulk Acoustic Wave Resonators.- 2. Contour-Mode Aluminum Nitride Piezoelectric MEMS Resonators and Filters.- 3. Nano-Electro-Mechanical Systems (NEMS).- 4. Future Trends in Acoustic RF MEMS Devices.- Part II: MEMS-based Circuits.- 5. The Design of Low-power High-Q Oscillators.- 6. 5.4 GHz 0.35µm BiCMOS FBAR-based Single-ended and Balanced Oscillators in Above-IC Technology.- 7. Low Power Quadrature Oscillator Design Using BAW Resonators.- 8. Tunable BAW Filters.- Part III: MEMS-based Systems.- 9. A MEMS-enabled Two-receiver Chipset for Asynchronous Networks.- 10. A 2.4 GHz Narrowband MEMS-based Radio.- 11. A Digitally Controlled FBAR Frequency Reference.- 12. A Robust Wireless Sensor Node for in-Tire-Pressure Monitoring.