InhaltsangabeChapter 1: Introduction to Helium Ion Microscopy

Chapter 2: Microscopy with Ions  - A brief history

Chapter 3: Operating the Helium Ion Microscope

Chapter 4: Ion -Solid  Interactions  and Image Formation

Chapter 5: Charging and  Damage

Chapter 6: Microanalysis with the HIM

Chapter 7: Ion Generated Damage

Chapter 8: Working with other Ion beams

Chapter 9: Patterning and Nanofabrication

Conclusion

Bibliography

Appendix: iSE Yields,  and IONiSE  parameters for  He+ excitation  of Elements and Compounds

Index